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This paper reports a novel micro airflow anemometer based on the hot-film sensing principle, i.e. gas cooling of electrically heated resistance. The sensor with three Ti/Pt hot-film sensing components with width of 50µm and thickness of 130nm has been fabricated on a glass tube in a UV lithography system with multi-layer alignment by our developed MEMS compatible lab-on-a-tube technology. The micro...
Free-standing amorphous carbon (a-C) cantilever structures were successfully fabricated by a single photolithography step. The relatively thick (~1 μm), smooth (R rms ~0.75 nm), low stress (<300 MPa) a-C films that exhibit low friction (<~0.08) and wear rate (order of 10 -9 mm 3 /Nm) were deposited by filtered cathodic vacuum arc (FCVA) deposition system,...
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