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Measurements of two- and multi-particle angular correlations in pp collisions at s=5,7, and 13TeV are presented as a function of charged-particle multiplicity. The data, corresponding to integrated luminosities of 1.0pb−1 (5 TeV), 6.2pb−1 (7 TeV), and 0.7pb−1 (13 TeV), were collected using the CMS detector at the LHC. The second-order (v2) and third-order (v3) azimuthal anisotropy harmonics of unidentified...
A multilevel back-end-of-line structure with a dielectric constant κ ≤ 2.4 ultra low-κ materials was developed. κ=2.2 ULK build was demonstrated at a 144nm wiring pitch and a κ=2.4 ULK was demonstrated at a 288nm pitch. Good model-to-hardware correlation for the measured capacitance indicated no significant plasma damage to the ULK 2.2 material. The extracted copper resistivity was consistent with...
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