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The effect of the top insulator on the stability of a-Si thin-film transistors (TFTs) is shown. TFTs with different top insulators show different Delta Vth (threshold voltage shift), and this Delta Vth is proportional to the flat-band voltage shift of an MIS (metal insulator semiconductor) capacitor fabricated with the same insulator. Furthermore, Delta Vth depends on the size of the gate/drain overlap,...
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