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Droplet epitaxy (DE) of InN quantum dots (QDs) on GaN templates using radio frequency plasma‐assisted MBE system has been reported. Two different methods of DE technique, by varying the nitridation and annealing sequence, have been employed. The various growth parameters were systematically optimized to grow non‐coalesced InN QDs without any uncrystallized In droplets. Dimensions of the QDs grown...
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