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This work is focused on the application of Phononic Crystals to reduce anchor losses of MEMS contour mode resonators. Anchor losses dominates the losses in these type of released resonators at low frequency and at low temperature. The use of phononic crystals, intended as finite-periodic distribution of holes in the anchor, is fully compatible with fabrication processes and moreover it is easy to...
The innovation of the radio-guided surgery exploiting β- emitters is the higher tumor-to-non-tumor ratio (TNR) allowing both a smaller radiopharmaceutical absorbed dose to detect cancerous remnants and the possibility of extending the technique also to cases with a large uptake of surrounding healthy organs, as for brain tumors. Our first study cases are meningiomas, since an appropriate β- emitting...
This paper presents a new technique to increase the quality factor, Q, of AlN Contour Mode Resonators (CMRs). The technique uses etched slots in the body of AlN CMRs to reduce energy dissipation through the anchors. The reduction of the energy lost through the supporting anchors improves the device Q without altering its electromechanical coupling, kt2. An almost 50% improvement in the Figure of Merit,...
This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (Wa) and length (La) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main...
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