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The composition of transition layer (TL) formed between Lu 2 O 3 and Si(100) substrate was determined non-destructively by applying newly developed depth profiling method to the angle-resolved Si 2p and Lu 4d photoelectron spectra. The conduction and valence band alignments of Lu 2 O 3 with respect to Si(100) were also determined from the measurement of O 1s photoelectron...
The capability of Auger transition probabilities experimentally derived from X-ray excited Auger electron spectra in XPS were tested. The relative sensitivity factor (RSF) method has been employed in the quantification by AES (Electron excited Auger electron spectroscopy). However, the difference between experimentally derived RSF and theoretically calculated ones has been found in some reports. One...
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