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Poloidal and radial distributions of the hydrogen flux, both atomic and ion, to the plasma facing materials (PFMs) are measured with four fixed and one movable PdCu membrane probes in the QUEST spherical tokamak. Direct information about hydrogen retention in the areas far from main plasma-wall interaction is essential because the significant part of the global retention is due to atomic hydrogen...
In order to coat TiO 2 film over a large area for an industrial application, we have developed a large area electron-beam-excited plasma (EBEP) of meter size. Taking advantage of the remarkable features of controlled-EBEP, the composition and the thickness of TiO 2 film could be directly controlled by the accelerating voltage V A and the discharge current I D of EBEP,...
Large-diameter high-density plasmas such as ECR-, helicon-, inductively-coupled, and surface-wave plasmas have been developed for thin film technologies in the next generation. Applications of such high density plasmas to etching and CVD processes require deeper understanding of discharge physics as well as advanced plasma control. In this paper, new findings of antenna-plasma coupling processes in...
Three-dimensional particle orbit simulations are carried out to analyze the electron orbits in a magnetron sputtering system. Collisions between electrons and neutral Ar gas atoms are included using the Monte-Carlo method. Ionization points are related to the plasma generation points and approximate the distribution of plasmas in the magnetron sputtering system. The profiles of plasma distribution...
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