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This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed...
This study presents the approach to implement the interferometric modulation color pixels application by using nanoporous anodic aluminum oxide (np-AAO) layer as the key suspended micro structure. In this work, the presented bi-stable color pixels have averaged reflectivity of 60%, and the central wavelengths are 651 nm, 554 nm and 452 for red, green and blue, respectively. Advantages of the presented...
This study presents a novel approach to fabricate highly-structured 3D vertically-aligned carbon nanotubes (VA-CNTs) architectures, and further integrates 3D VA-CNTs with MEMS surface micromachining to fabricate suspended 3D CNTs structures. The merits of presented approach are as follows: (1) highly-structured 3D VA-CNTs stacks can be achieved by predefining multilayered Al/Fe catalyst films; (2)...
This study presents a simple process to implement inorganic nanoporous anodic aluminum oxide (named np-AAO) on PET/ITO substrate for flexible liquid crystal display (flexible-LCD) application. This is the first time to demonstrate micromachined inorganic np-AAO on PET/ITO substrate as reservoir and alignment layer for liquid crystal (LC). The np-AAO offers three advantages for flexible-LCD, (1) the...
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