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This letter presents a 100-GHz integrated Quasi-Yagi antenna on silicon substrates of low resistivity 10 Omegamiddotcm. The fabrication was realized with the back-end-of-line process. The characterization was conducted on wafer with Cascade Microtech coplanar probes and an HP8510XF network analyzer. Reflection measurements show a return loss of 8.2 dB at 100 GHz and a -6-dB impedance bandwidth of...
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