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The need for a smaller beam size has been driven by the goals of producing nanostructures using proton beam writing (PBW) and also improving the spatial resolution for ion beam applications (e.g. PIXE, RBS, IBIC, etc.) to nanodimensions. Thus, it is vital to have a resolution standard which has a high degree of side-wall straightness. PBW, as a true direct-write 3D micromachining process, is an ideal...
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