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This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted...
Stretchable electronics and sensors have been attracting significant attention due to their unique characteristics and wide applications. This paper demonstrates a prototype of a fully stretchable temperature sensor on an elastomeric substrate. The sensor was first fabricated on a silicon-on-insulator (SOI) wafer and then transferred to a pre-strained elastomeric polydimethylsiloxane (PDMS) substrate...
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