The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University of Trento.
The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innovative detectors realized by means of these technologies
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.