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In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. Aiming at a systematic design of the both control systems, at first, the 6-degree of freedom equipment is...
In the manufacturing industry especially in the semiconductor, the requirement for high-speed, fast-response and high-precision performances is critical. In this paper, the model predictive control is introduced to the positioning control of ultra-precision stage driven by a linear actuator. The linear actuator is the non-resonant ultra-sonic motor (SPIDER) which has the strong non-linearity due to...
In recent years, a high-precision stage control has received great attention due to the progress of nano-technology. A fast-response and high-precision control method based on the internal model control in the case where the controlled object has the integral characteristic is reported. The disturbance observer-based internal model control (DIMC) system has the advantages of no-overshoot, easy-design...
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