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A novel NiPt-silicide formation using microwave annealing (MWA) is proposed, and superior properties of NiPt silicide in ultra-shallow junction (USJ) are demonstrated for the first time. MWA is suitable for the thin NiPtSi formation with its stable and ultra-low temperature (less than 250 °C) heating. The anomalous Ni diffusion during the NiPtSi formation is considered to be suppressed because MW...
The present paper deals with the high-speed machining of Inconel 718 and Ti-6Al-6V-2Sn alloys from a thermal point of view. Temperature and wear of cutting tools are investigated by means of cutting experiments and numerical analysis up to a cutting speed of around 600 m min -1 . For Inconel 718, severe wear of ceramic tools, particularly highly developed boundary notch wear, is correlated...
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