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RF-MEMS is an emerging area of MEMS technology that is revolutionizing RF- and microwave applications. RF-MEMS devices have a broad range of applications in military and commercial wireless communication, navigation and sensor systems. Agile RF-systems require reconfigurable frontends that can steer the beam over a wide frequency range. Such applications always require some kind of switches. The RF...
This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors...
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