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In this paper, a method of fabricating active CMOS-MEMS AFM-like conductive probes with nanometer-sized probe tips for Tip-directed Field-emission Assisted Nanofabrication (TFAN) is reported. We envision an approach using tip-directed chemical vapor deposition (CVD) for the deposition of Si nanowires (SNWs), using field-emitted electrons to locally crack adsorbed precursors (silane/disilane) through...
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