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Measurements of residual stresses in textured thin films have always been problematic. In this article, a new experimental method using grazing-incidence X-ray diffraction is presented with its principles based upon the conventional sin 2 ψ method. Instead of using the Bragg-Brentano (B-B) or Seemann-Bohlin geometry, the proposed method utilizes an asymmetrical diffraction geometry for which...
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