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Composite coating techniques are becoming increasingly popular owing to their peculiar performances. In this study, the wear resistance of thermally sprayed Ni-MoS2 composite coatings on an AISI 1020 steel substrate was investigated. Ni-MoS2 composite powder (size: 60-90 μm) containing 25 wt.% of dispersed MoS2 was prepared by electroless plating. Ni-MoS2 composite coatings were then prepared by HVOF...
As device dimensions shrunk to the 14 nm node and beyond, damascene Cu/low-k high aspect ratio of interconnect schemes face extreme difficulties in achieving defect-free Cu gap-fill. The CVD Co was implemented to improve Copper interconnect performance which was deposited between the PVD Ta(N) liner barrier and the Cu seed layer to improve copper to barrier adhesion and copper gap fill. Therefore,...
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