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This work proposes single crystal X-cut thin film Lithium Niobate (LN) resonators operating in a shear horizontal (SH0) acoustic plate wave mode to achieve a high electromechanical coupling coefficient. In the fabrication process, we take advantage of the off-the-shelf single crystal X-cut LN dies on which surface micromachining technology is used to fabricate the devices. We design two fabrication...
We demonstrate an integrated silicon and ultra-low-loss silica waveguide platform. Coupling between layers is achieved with (0.4±0.2) dB of loss per transition and a 20 nm 3-dB bandwidth.
This study demonstrates the concept of controlling the quality factor of a micro-cantilever using hydrodynamic coupling of active mechanical structures. The active micro structures (auxiliary-cantilevers) adjacent to the micro-cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of the operating-cantilever. Thus, the quality factor of operating-cantilever...
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