The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
The work done by various forces acting on the air bearing slider are analyzed and calculated, and their contributions to the flying stabilities of a sub-5 nm air bearing slider are evaluated quantitatively. It is found that the air bearing force plays an important role on the slider's flying stabilities, while the intermolecular force and the friction force tend to excite the slider bouncing.
Experimental and modeling studies concerning the etching of InP by chlorine plasma have been achieved. Chlorine plasma discharge has been analyzed using Langmuir probe. The latter allows to measure the electron density and temperature as a function of ICP reactor parameters such as RF power, chlorine flow rate and pressure. These two parameters play a crucial role in the modeling of plasma etch process...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.