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X-ray Active Matrix Pixel Sensors (XAMPS) were designed and fabricated as part of a detection system for the X-ray Pump Probe (XPP) instrument at the Linac Coherent Light Source (LCLS). XAMPS based on J-FET technology were produced on 100 mm high-resistivity silicon, typically 400 μm-thick. The prototypes are square matrices with n rows and n columns with n=16, 32, 64, 128, 256, 512. Each pixel of...
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