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In this paper, we introduce a sample preparation technique for two-dimensional (2D) dopant concentration profiling in silicon based devices. Selective chemical etching will be shown in a series of tunneling field-effect transistors (FETs). It is experimentally proven that this method offers a high success rate and provides a simple route to Transmission Electron Microscopy (TEM) study of 2D dopant...
Solar cells consisting of extremely uniform and ordered large-area arrays of silicon micropillars are fabricated using metal-assisted chemical etching. Micropillar diameter, pitch, height, and core-shell doping profiles are optimized for light trapping and carrier collection.
We report a top-down fabrication method that involves the combination of superionic-solid-state-stamping (S4) patterning with metal-assisted-chemical-etching (MacEtch), to produce silicon nanowire arrays with defined geometry and optical properties in a manufacturable fashion.
High aspect ratio (< 30:1) ferroelectric structures have potential applications in areas such as tunable photonic crystals, biosensors and miniaturized transducers. Mechanically unconstrained and free standing Pb(Zr0.52,Ti0.48)O3 (PZT) tubes (1??2 microns in diameter) were processed with pre-patterned porous silicon templates using a Liquid Source Misted Chemical Deposition (LSMCD) technique. After...
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