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We have investigated the N‐ and Ga‐polar faces of bulk GaN substrates with photoluminescence (PL) and the surface photovoltage (SPV) technique using a Kelvin probe attached to an optical cryostat. Experiments were conducted in vacuum. Some of the surfaces were mechanically polished (MP), while others were epi‐ready after a chemical‐mechanical polish (CMP). From the SPV measurements, the band bending...
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