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The development of ultra-compact integrated nanophotonic structures for communications, sensing, and signal processing has been of great interest lately. In this review paper, we first present the requirements for practical realization of integrated nanophotonic chips and then explain how these requirements are met by using low-loss waveguides and high quality resonators with careful engineering of...
We demonstrate the fabrication of high Q microdisk resonators on an SOI platform using thermal nanoimprint lithography. The achieved Q factor is 60000 for 2 μm radius disks. Arrays of 32 resonators show uniform spectral response.
We report the experimental observation of long-sustained GHz electronic oscillations resulting from coupled electron-photon dynamics in ultra-high-Q Si microdisk resonators with CW pumping. Theoretical analysis identifies conditions for steady-state GHz oscillations while suppressing thermal oscillations.
In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external...
In this paper, outgassing of the thin film vacuum package is analyzed by integrated MEMS (Microelectromechanical system) resonator and RBS (Rutherford backscattering spectroscopy). Outgassing behavior of different thin film packaging materials is studied by exodiffusion experiments. It is demonstrated that a high temperature pre anneal will greatly reduce the outgassing but can not eliminate it.
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