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The deposition behavior of 300-1500 atom Au clusters was studied with molecular dynamics (MD) using a potential of the embedded atom method (EAM). This study was aimed at examining the possibility of thin-film growth by a cluster as a building unit, which had been suggested in the charged cluster model (CCM) (Hwang et al., J. Crystal Growth 162 (1996) 55). According to the CCM, most of the commercially...
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