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A concept for in situ device processing has been demonstrated by the fabrication of Au/CdTe device like structures using shadow mask selective area epitaxy (SAE) and in situ metallization. Patterned CdTe epilayers were grown in the molecular beam epitaxy (MBE) chamber using shadow mask SAE (in situ patterning) and then directly transferred within ultrahigh vacuum (UHV) into a metal evaporation chamber...
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