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The piezoelectric layered structure Me1/AlN/Me2/single crystalline diamond was developed. Acoustic properties of number the layered structures have been studied on microwave frequency band. The frequency dependence of quality factor was estimated as Q·f ≈ 5.6·1013. The pressure and temperature influence on the resonant frequency have been studied. First resonant overtones with Q ∼ 2500 were observed...
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