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A novel sensor structure using SnO 2 thin film matrix integrated with nano-clusters of metal oxide modifiers were fabricated with the help of rf-diode sputtering for low level (500ppm) detection of SO 2 gas at lower operating temperature of 180°C. Ultrathin dotted clusters (10nm thick and 600μm dia.) of various metal oxide catalysts (PdO, CuO, NiO, MgO, V 2 O 5 ) were...
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