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Nanorobotics have been successfully applied to investigate the physical and biomedical properties in the nano scale. As the center piece of nanorobotcis Scanning probe microscope (SPM) has been widely used to measure the topography information of sample surface as well as serving as a manipulation and sensing tool to modify and measure the mechanical and physical properties of sample. However, the...
Atomic force microscopy (AFM) based nanomanipulations have been successfully applied to various fields such as physics, material science and biomedical studies. In general, the precision of AFM based nanomanipulation has been compromised mainly by hysteresis and creep of the piezo actuator. In this paper, a new approach, named scan range adaptive hysteresis/creep hybrid (SAH) compensator, is proposed...
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