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Zirconium nitride (ZrN) films were deposited by ion beam sputtering technique on stainless steel 304 substrates using a mix of (Ar+N 2 ) gas. In this paper, the effects of N 2 /(N 2 +Ar) flow ratio (F(N 2 )) and substrate temperature on the microstructure and microscopic properties of the deposited films were investigated. The phase and the morphology were characterized...
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