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Realization of a high frequency resonator for 3.6 GHz-band filter in the International Mobile Telecommunication Advanced (IMT-Advanced) system is desired. It is difficult to accomplish such a high frequency resonator using conventional surface acoustic wave (SAW) technology, because the strip width of the inter-digital transducers (IDT) becomes too narrow. Although anti-symmetry 1st (A1) mode Lamb...
We have improved ELK film so that it is suitable for the processes used in fabricating Cu interconnects without using a dielectric protection layer for CMP, the so called “direct CMP process”. The depth profile of the pore size in the film was successfully controlled to prevent water absorption during the CMP process with a limited k-value increase in the film. The line-to-line dielectric breakdown...
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