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This paper presents a model-based ultra-precision stage control that utilizes a contact-type non-resonant ultrasonic actuator. The linear actuator is the synchronous piezoelectric device driver (SPIDER), which has the strong non-linearity due to the friction drive mechanism. Therefore, the friction characteristics are at first experimentally evaluated. Next, focusing on the non-linear property of...
In the manufacturing industry especially in the semiconductor, the requirement for high-speed, fast-response and high-precision performances is critical. In this paper, the model predictive control is introduced to the positioning control of ultra-precision stage driven by a linear actuator. The linear actuator is the non-resonant ultra-sonic motor (SPIDER) which has the strong non-linearity due to...
Microsurgery and microassembly are some high precision tasks that require the assistance of a micromanipulator. However, in order to manipulate micro objects it is inevitable to consider the scaling effect problem between the worlds with different physical characteristics. Some scaling methods have been proposed, but how the scaling gains affect the human operator performance is still a remaining...
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