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We have developed the digital output piezoelectric accelerometer using CMOS-compatible AlN thin films. The AlN thin films were deposited by sputtering. The multilayer of Pt/Ti/AlN/Pt/Ti/SiO2 has been fabricated into the piezoelectric accelerometers, where the patterned AlN thin films are arrayed in parallel and electrically connected in series. The sensitivity of the fabricated accelerometer reaches...
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