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High resolution FIB offers nowadays the capability to sculpt matter at the nanometer scale. Using FIB to engrave membranes opens new emerging routes for nanoscience tooling. We propose here a way to fabricate tensile SiC membranes (with thicknesses adjustable between 10 and 100nm), in order to drill them with high resolution focused ion beam, to obtain holes below 15nm. Moreover, we show how we can,...
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