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In this work, we investigate vertically aligned carbon nanotube (CNT) membranes as building blocks to realize electrostatically actuated micro-electro-mechanical-systems (MEMS). The fabricated CNT dense arrays are grown on adjacent metal electrodes and can be actuated by applying a DC bias. The conductive membranes deflect when actuated and a clear pull-in is observed, as in any conventional MEM device...
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