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This paper reports on the design and fabrication of a fully integrated antenna beam steering concept for airborne applications at 17GHz. The system is based on a single wafer process including a dipole antenna, a balun and a 2-bit distributed MEMS phase shifter (in a 7×3mm high-resistivity-silicon dice). To our knowledge, it is the first time that such integration has been done. First results of individual...
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