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Noble metal medium entropy alloy (MEA) thin films have recently attracted enormous research interests recently because of their great potential in the catalytic application. However, conventional bottom‐up fabrication methods for MEA thin film such as magnetron sputtering face enormous challenges including precise control over film thickness and consumption of costly high‐purity noble metal targets...
Noble metal‐based (Pt, Ir, Pd) medium entropy alloy (MEA) thin film has been fabricated by sequential atomic layer deposition (ALD), followed by electric Joule heating as described in the article number 2201263 by Kwan W. Tan, Alfred Iing Yoong Tok and co‐workers. This novel two‐step method gives precise thickness control and tunable atomic ratio of the MEA thin film. The PtIrPd MEA thin film with...
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