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Ta 2 O 5 and porous Si were investigated as alternative sensor materials for the light-addressable potentiometric sensor (LAPS). The Ta 2 O 5 LAPS, prepared by the pulsed laser deposition (PLD) technique, showed a high pH sensitivity of 57.5mV/pH and a good linearity. Porous Si was prepared by anodic etching of Si in a mixture of HF and ethanol. The porous Si LAPS with...
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