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We report the effects of UV-ozone oxidation, oxide removal etch chemistry (dilute HCl or concentrated NH4OH), semiconductor doping, and annealing on the contact resistivity (rhoc) of Ti0.1W0.9 refractory alloy to n-type InGaAs. The semiconductor surface was oxidized through exposure to UV-ozone, then subsequently etched by either dilute HCl or concentrated NH4OH before TiW contacts were deposited...
This paper presents an intuitive analysis and design/fabrication of a millimeter-wave (MMW) divide-by-3 injection-locked frequency divider (ILFD). Implemented in a 0.18 mum BiCMOS technology, the ILFD circuit exhibits an injection locking range of 1.8-2.7 GHz, a measurement-limited operating range of 75.6-78.6 GHz inside a PLL while simulated is from 70.1-82.3 GHz, and a phase noise of -105 dBc/Hz...
Gas chromatography columns produced using microelectromechanical systems (MEMS) technology makes it possible to achieve very narrow widths as it improves the separation efficiency. However, coating these columns to obtain a uniform stationary phase is challenging using traditional techniques. This paper presents an important step to address this issue by merging MEMS and nanotechnology and reports,...
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