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This paper which is based on a project between Applied Materials and the Institute of Materials Research and Engineering (IMRE) describes a novel methodology to characterize the fracture toughness of silicon nitride (SiN) thin films deposited at ultra-low temperatures of 100–180°C by the Plasma Enhanced Chemical Vapour Deposition (PECVD) method. SiN thin films were deposited under varying conditions...
Electrical performance of MOS2 transistor, especially carrier mobility, can be greatly improved by screening the Columbic scattering by a high-k gate dielectric. In this work, Ti is incorporated into HfO2 to form HfTiO dielectric with a higher permittivity, which leads to further enhancement of the screening effect and thus carrier mobility. The effects of annealing ambient (N2, O2 and NH3) on the...
The interpretion of GPR data is usually limited by the attenuated signal and noise interference. The signal-to-noise ratio (SNR) of the received GPR data is influenced by the characteristics of GPR systems, the target signatures, the properties of the medium, and by incoherent random noise. The original attributes of the data will be distorted by noise. Usually, noise removal is conducted by employing...
High stresses generated from chip-package interactions (CPI), especially when large die is flip mounted on organic substrate using Pb-free C4 bumps, can easily cause low-k delamination. A novel scheme by applying an elastic material can effectively reduce the transmitted stresses and, thus, resolve the interfacial delamination issue. Along with an optimized chip-package integration solution, a reliable...
Bespoke manufacturing strategies, such as Make-To-Order, are increasingly employed by individual companies as well as supply chains competing on customized products/services. Uncertainties from individual requirements greatly increase the complexity of the operation and production process, making planning and control activities extremely difficult. Workload Control (WLC) is a Production Planning and...
We present an analysis of the time of arrival (TOA) and time difference of arrival (TDOA) based positioning methods in Non-Line-of-Sight (NLOS) environments. Single path propagation is assumed. The positioning accuracy is investigated in terms of Dilution of precisions (DOPs) depending on different NLOS cases. We then show that the weighted DOP (WDOP) is equal to the Cramer-Rao Lower Bound (CRLB)...
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