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In this work, a fabrication process of piezoelectric PZT [Pb(Zr0.52Ti0.48)O3] thick films up to 60 μm deposited on silicon and aluminum substrates is reported. Crystalline spherical modified PZT powder about 300 nm in diameter was used as filler. PZT polymeric precursor produced by Chemat Inc. was used as the matrix material. Spinning films were annealed at 700 °C for one hour in the furnace in air...
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