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The solar industry uses low-cost solidification processing methods to produce silicon wafer-based solar cells. The solidification processing can introduce crystalline defects and residual stresses in the wafers, which may impact the electrical performance and mechanical reliability of a finished solar cell. This paper presents a polarized infrared imaging system that achieves both infrared photoelastic...
While anodic bonding is commonly used in a variety of microelectromechanical systems (MEMS) applications, devices and substrates that incorporate this processing technique are often subjected to significant residual stress and curvature that create post-processing and reliability issues. Here, using an anisothermal anodic bonding procedure, residual stresses and the resulting wafer curvature in these...
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