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The atomic structure of mixtures of titania (TiO2) and tantala (Ta2O5) ion-beam sputtered amorphous thin film coatings at various post-deposition annealing temperatures have been studied using Ta LIII and Ti K edge Extended X-ray Absorption Fine Structure (EXAFS). The results indicate that post-deposition annealing produces subtle changes in the short range order (<1nm) for samples which remain...
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