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Gamma-ray irradiation-enhanced wet-etching of proton-exchanged Z-cut Y-propagating LiNbO3 is presented. The etched ridge height of a sample with gamma-ray irradiation of intensity 650 krad/h on a LiNbO3 substrate for 30 min is three times larger than that without. Moreover, experimental results show the propagation loss values of Ti-indiffused LiNbO3 waveguides fabricated on the irradiated ridge structures...
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