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A novel MEMS distributed phase shifter for D-band application is presented, in which the open-ended CPW lines in series with MEMS bridge provides exactly capacitance in order to optimize the instability caused by the MEMS bridge movement and meet the required loaded capacitance. The planar structure of open-ended CPW lines could enhance the reliability and avoid performance degradation because of...
This paper presents an new modeling method that RF MEMS device is divided into some typical structures, which can be considered as different transmission lines and be modeled respectively to get equivalent circuit model of the device by cascading. Applying the modeling method to DMTL, the equivalent circuit model and the relationship between model parameters and physical size are obtained after MEMS...
Recent advances in high-contrast grating (HCG) vertical-cavity surface-emitting lasers (VCSEL) emitting at 1550 nm is reported in this paper. The novel near-wavelength HCG has an ultrathin structure and broadband reflectivity. It enables a monolithic, simple fabrication process for realizing InP-based VCSELs emitting at ∼1550 nm. We report 2.4-mW single-mode output under continuous-wave operation...
A new measurement scheme to characterize MEMS-VCSEL linewidths is demonstrated. Linewidth in the range of 40∼60MHz is measured for 1550-nm high contrast grating VCSELs. We identify key contributors of the Brownian-motion-induced broadening for future optimization.
This study designs and fabricates a suspending antenna on silicon substrate with backside electromagnetic band-gap (EBG) structures using surface and bulk micromachining techniques. The proposed Si-based antenna with dimension 7 mm × 18 mm × 0.5 mm only and is constructed of a ground copper plane, supporting copper vias, a suspending F-shape copper conducting layer and backside silicon cavities (to...
Micromechanical cantilever-based mass sensors are more sensitive with the miniaturization of size. However, when the dimensions of the device reduced to nano-scale, the common optical readout is confronted by the diffraction influence. A resonance-enhanced micromechanical cantilever (REM-cantilever) is developed for mass sensing without reducing the cantilever size. The geometry of the REM-cantilever...
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