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This digest paper describes experimental demonstration of high-frequency silicon carbide (SiC) microdisk resonators operating in aquatic environments, including water and water solutions of H2O2 and NH4OH. We demonstrate, for the first time, that center-clamped circular SiC microdisks can preserve multiple robust flexural-mode resonances in water. We have observed strong multimode responses in the...
Square poly cry stalline 3C silicon carbide (poly-SiC) thin diaphragms with large aspect ratios (i.e., side length to thickness: L/t ∼ 600) are explored as a structural material for micromechanical resonators. The effects of varying pressure on the characteristics of multiple resonant modes are studied. Load-deflection tests reveal a Young's modulus of EY = 344 ± 13 GPa and a residual (built-in) stress...
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