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We have fabricated high-κ Ni/ZrO2/TiN metal-insulator-metal capacitors with a very high 52-fF/μm2 capacitance density, a low leakage current of 1.6 × 10-7A/cm2, and good ten-year reliability with a small ΔC/C of 1.7% at 2 V. From X-ray diffraction measurements, laser annealing can improve the permittivity of ZrO2 due to tetragonal-phase formation which in turn helps enhance capacitance density and...
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