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In this paper, we describe a new production method for microscale silicon carbide (SiC) ceramics parts. Slip casting with SU8 micro mold was carried out for the fabrication of a three-dimensional SiC MEMS component, which was made from polycarbosilane (PCS) precursor-derived SiC nano powder. SiC nano powder was mixed with a PCS solution. The slips were then cast into SU8 micro mold made on porous...
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