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A single PZT metallic target has been utilized to deposit lead zirconate titanate (PZT) films by DC pulsed magnetron sputtering on Ti/Pt(111)/Ti coated Si wafer and on Au coated glass fibers. Multicrystalline PZT films were obtained after post treatment by conventional (CA) and rapid thermal annealing (RTA) at 650??C in air and vacuum. The influences of both post-annealing treatments on the film properties...
A single PZT metallic target has been utilized to deposit lead zirconate titanate (PZT) films by DC pulsed magnetron sputtering on Ti/Pt(111)/Ti coated Si wafer and on Au coated glass fibers. Multicrystalline PZT films were obtained after post treatment by conventional (CA) and rapid thermal annealing (RTA) at 650??C in air and vacuum. The influences of both post-annealing treatments on the film properties...
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