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The Zn/Sb multi-layer thin films were prepared by magnetron sputtering method, which was sputtered on (100) Si five times by two single targets. The variations of the Seebeck coefficient, the electric conductivity and the power factor of three Zn/Sb composite films, which was of modulation ratio of 1∶1, 3∶2 and 4∶1 respectively in a fixed modulation period of 40nm, were studied in the temperature...
In this paper, the preparation techniques of multi-layer Bi/Sb composite semiconductor nano-film were developed with single-crystal silicon as thermal insulation substrate and Bi/Sb as sputter targets using magnetron sputtering. Four kinds of semiconductor nano-film were fabricated with the different Bi/Sb modulation ratios which respectively equaled 1∶4, 3∶2, 4∶1, 1∶4 and the modulation period was...
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